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New Heidelberg μMLA Expands VINSE Cleanroom Fabrication Capabilities

uMLA images from VINSE cleanroom
(l) Cr/glass mask for the creation of flexible neural probes (r) Direct write of patterns using 375 nm laser vector writing mode

VINSE is excited to announce that the Heidelberg μMLA Maskless Aligner is available to users in the cleanroom. This new direct-write photolithography tool has a faster write speed than our old tool, is compatible with both positive and negative photoresists, has a Draw Mode that allows real-time adjustments to existing patterns and electrical contacts, and can be used to make masks that are compatible with the VINSE Karl Suss MA-6 Mask Aligner to enable higher throughput wafer-scale patterning. The μMLA Maskless Aligner supports rapid prototyping for research ranging from high power and high frequency semiconductor devices to microfluidic lab-on-a-chip devices. For training and access information, please visit: Heidelberg μMLA Maskless Aligner